Fundamental Principles of Optical Lithography: The Science of Microfabrication

Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.

• | Author: Chris Mack
• | Publisher: John Wiley & Sons Inc
• | Publication Date: Nov 16, 2007
• | Number of Pages:
• | Language:
• | Binding: Paperback / softback
• | ISBN-13: 9780470727300
• | ISBN-10: 0470727306